Usage case example details

Optical Coatings Japan manufactures filter mirrors for semiconductor manufacturing equipment and for the equipment used for liquid crystal and OLED. The film quality for the filters and mirrors in these fields requires high durability against ultraviolet light sources. In recent years, as the use of ultraviolet light sources with shorter wavelengths has increased, there has been even stronger demand for more durable film quality than before. In response to this, we have optimized our film formation processes and succeeded in securing film quality with higher durability than the conventional products. This is largely due to the fact that we succeeded in reducing the spectral loss of the film material used. We also select the film formation processes and materials to always enable the provision of the optimal product with consideration of the fact that the durability required will depend on the light source used. Optical Coatings Japan will continue to focus effort on the development of filters and mirrors for the semiconductor field in order to continue to meet the customer requirements.

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